JPH0334578B2 - - Google Patents

Info

Publication number
JPH0334578B2
JPH0334578B2 JP58177373A JP17737383A JPH0334578B2 JP H0334578 B2 JPH0334578 B2 JP H0334578B2 JP 58177373 A JP58177373 A JP 58177373A JP 17737383 A JP17737383 A JP 17737383A JP H0334578 B2 JPH0334578 B2 JP H0334578B2
Authority
JP
Japan
Prior art keywords
light
circuit
level
inspected
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58177373A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6069539A (ja
Inventor
Masahiko Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP17737383A priority Critical patent/JPS6069539A/ja
Publication of JPS6069539A publication Critical patent/JPS6069539A/ja
Publication of JPH0334578B2 publication Critical patent/JPH0334578B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP17737383A 1983-09-26 1983-09-26 表面欠陥検査装置 Granted JPS6069539A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17737383A JPS6069539A (ja) 1983-09-26 1983-09-26 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17737383A JPS6069539A (ja) 1983-09-26 1983-09-26 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS6069539A JPS6069539A (ja) 1985-04-20
JPH0334578B2 true JPH0334578B2 (en]) 1991-05-23

Family

ID=16029815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17737383A Granted JPS6069539A (ja) 1983-09-26 1983-09-26 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS6069539A (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244615A (ja) * 1985-08-22 1987-02-26 Mitsubishi Electric Corp 距離測定装置
JPS62179642A (ja) * 1986-01-31 1987-08-06 Kobe Steel Ltd 表面欠陥検出装置
JPS63106510A (ja) * 1986-10-24 1988-05-11 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
US5329351A (en) * 1992-11-24 1994-07-12 Estek Corporation Particle detection system with coincident detection
JP2002286431A (ja) * 2001-03-27 2002-10-03 Hirose Technology Kk 表面凹凸検査方法および検査装置
EP4459269A1 (en) * 2021-12-28 2024-11-06 Nikon Corporation Optical device and inspection method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933855B2 (ja) * 1974-09-06 1984-08-18 キヤノン株式会社 表面検査方法
GB1592449A (en) * 1976-12-01 1981-07-08 Ferranti Ltd Optical inspection apparatus

Also Published As

Publication number Publication date
JPS6069539A (ja) 1985-04-20

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